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幸研(教授)

所属单位:东南大学机械工程学院

担任职务:教授

擅长领域:

联系方式:52098413 邮箱:登录后查看

学习经历 1989年-1993年,东南大学,机械工程学院,本科/学士1993年-1996年,东南大学,机械工程学院,研究生/硕士1998年-2002年,东南大学,机械工程学院,研究生/博士 工作经历 2010年-现在,东南大学 教授、博士生导师2005年-2007年,日本 名古屋大学(Nagoya University)微纳系统工程系 博士后研究 1996年-2009年,东南大学 副教授、讲师、助教、硕士生导师2000年-2000年, 加拿大 Concordia大学访问学者 研究方向 1. 微纳系统制造工艺2. 微纳系统设计与模拟 MEMS CAD3. 航空钣金模具设计、制造成形分析优化4. 智能制造

主要成就

论文著作 [1] Yuan Li, M   A. Gosálvez, Y Xing Particle Swarm   Optimization-based Continuous Cellular Automaton for the simulation of Deep   Reactive Ion Etching Journal of   Micromechanics and microengineering. , 2015.  SCI [2] P  Pal, A Ashok, Y Xing. Anisotropic   Etching in Low Concentration KOH: Effects of Surfactant Concentration. Micro & Nano Letters. 2015.  SCI[3] P   Pal, S Haldar, S Singh, A Ashok, Y   Xing. A detailed investigation and explanation of the appearance of   different undercut profles in KOH and TMAH. Journal of Micromechanics and microengineering. , 2014, V24(7)   095026 .  SCI[4] P   Pal, M A Gosalvez, K Sato, Y Xing.   Anisotropic etching on Si{110}: experiment and simulation for the formation   of microstructures with convex corners. Journal   of Micromechanics and microengineering. 2014. 24(10) 125001  SCI[5] Jun Ni, WC   Tang, Y. Xing. A Simple Algebra   for Fault Tree Analysis of Static and Dynamic Systems.  IEEE   Transactions on Reliability, 2013, v62(4) 846-860. SCI [6] Jun   Ni, WC Tang, Y. Xing.   Three-dimensional Precision Analysis with Rigid and Compliant Motions for   Sheet Metal Assembly, International Journal   of Advanced Manufacturing Technology, 2014. 72(11). SCI[7]Y. Xing, M. A. Gosalvez, and K. Sato.   Evolutionary determination of Kinetic Monte Carlo rates for the simulation of   evolving surfaces in anisotropic etching of silicon Journal of Micromechanics and microengineering. , 2012, V22(8)   085020-085030.  SCI[8]M. A. Gosalvez, N Ferrando, Y. Xing. Simulating anisotropic   etching of silicon in any etchant: evolutionary algorithm for the calibration   of the continuous cellular automaton. Journal   of Micromechanics and microengineering. , 2011, V21(4) 065017-065027. SCI[9]   Y. Xing, M. A. Gosalvez, and K. Sato, A Genetic   Algorithm Based Kinetic Monte Carlo Simulatoin for the Evolution of Complex   Surface In Anisotropic Etching  2011, IEEE Solid-State Sensors, Actuators and   Microsystems IEEE Transducers. P 374-378[10]   Y. Xing, M. A. Gosalvez, and K. Sato,   Orientation-dependent surface morphology of crystalline silicon during   anisotropic etching using a continuous cellular automaton, Journal of Micromechanics and   microengineering. , 2010, V20(4) 015019-015029. SCI[11]   Y. Xing, M. A. Gosalvez, and K. Sato, Step flow based   Cellular Automaton for the simulation of anisotropic etching of complex MEMS   structures,2007,  New Journal of Physics, Vol 9(12):436-454.   SCI[12]M. A. Gosalvez, Y. Xing, and K. Sato, Discrete and continuous cellular automata   for the simulation of propagating surfaces. Sensor and Actuators: Physical A:, 2009, V155, p98-112  SCI[13]M. A. Gosalvez, Y. Xing, and K. Sato, Octree-Search Kinetic Monte Carlo. Sensor and Actuators: Physical A:,   2010, 156(3) 64-68.  SCI[14]M. A. Gosalvez, Y. Xing, and K. Sato, Atomistic method for the simulation of   evolving surfaces, Journal of   Micromechanics and microengineering. 2008, V18(4)  0550290-0550306  . SCI[15] M. A. Gosalvez, Y. Xing, and K. Sato, Analytical solution of the Continuous   Cellular Automaton for anisotropic etching, IEEE/ASME Journal of Microelectromechanical System. 2008, V17(2)   410-431  SCI[16] M. A. Gosalvez, Y. Xing, T. Hynninen, M. Uwaha, A. S. Foster, R. M. Nieminen,   and, K. Sato, Faster simulations of step bunching during anisotropic etching:   formation of zigzag structures on Si(110),   Journal of Micromechanics and Microengineering. 17 (2007) S27–S37.  SCI[17] Zhiyong Tan, Mitsuhiro Shikida, Masafumi   Hirota, Yan Xing, Kazuo Sato.   Characteristics of on-wall in-tube flexible thermal flow sensor under   radially asymmetric flow condition. Sensor   and Actuators: Physical A:, 2007, V138, p87-96. SCI[18] 幸研朱鹏易红汤文成,蒙特卡罗法单晶硅的腐蚀工艺表面微观形态仿真研究 2008, 半导体学报2010   V29(10) 2027-2031 EI.[19] 幸研朱鹏多次掩模湿法腐蚀硅微加工过程的蒙特卡罗仿真       2009机械工程学报   v45(1) 240-245  EI [20] 王树桥,幸研,仇晓黎, 齐建昌.   混合进化算法的Metropolis蒙特卡罗MEMS单晶硅湿法刻蚀工艺模型,2012机械工程学报   v48(1) 240-245  EI